Hello, I'm Kayoko Tajima of Agilent Technologies.
In this video, I'd like to show you Oscilloscope view function which enables to get an accurate pulsed IV curve by optimizing timing parameters.
The conventional DC IV measurement can cause device self-heating, and the measured characteristics is different from that of under actual operating conditions.
Pulsed IV mesurement can reduce the self-heating effects. As a result, it's becoming an common requirement for the evaluation of semiconductor devices.
For accurate pulsed IV measurement, it's important to set appropriate timing parameters such as measurement delay and pulse period by checking the pulsed waveform.
During the measurement, the voltage should be stable at the expected pulsed top voltage, and the current should be stable after settling.
Usually an oscilloscope is used to monitor the waveform, but the probing on wafer is troublesome, and only voltage waveform is monitored.
B1500A has Oscilloscope View function, which is integrated to MCSMU (Medium Current SMU). No need for external oscilloscope. You can monitor both voltage and current at any point of a curve.
The Oscilloscope View function enables to get an accurate pulsed IV curve by optimizing timing parameters easily.
Let's get an accurate pulsed Id-Vd curve of this MOSFET using Oscilloscope View.
First, open the Tracer Test mode to get the pulsed Id-Vd curve.
The drain and gate pulse width is set to 50 μs, and pulse delay is 0 μs.
Let's run the measurement.
Now I apply up to 30 V.
It looks nice curve, but it doesn't reach to 30 V. What's happen? Let's check the waveform on oscilloscope view.
The waveform at this bias condition is now monitored.
The green line shows drain voltage, the purple line shows drain current, and this line shows meaurement timing. As you see, the measruement is performed before the drain voltage reaches to 30 V.
Let's change the timing parameters to see what happens.
Now I'm adding the delay for gate.
As you see, the drain pulse reaches to 30 V at measurement timing.
And pulsed Id-Vd curve reachs to 30 V.
It's important to adjust the timing parameters for accurate pulsed IV measurement. We can optimize the timing parameters for pulsed IV measurement by checking the voltage and current waveform with Oscilloscope View function.
The Oscilloscope View function enables you to get an accurate pulsed IV curve by optimizing timing parameters easily.